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Quartz bases

product details

The 12 inch semiconductor quartz bases are engineered support structures designed to hold wafer boats or carriers securely during high-temperature semiconductor processes. Crafted from ultra-high purity fused quartz, these bases deliver outstanding thermal stability, corrosion resistance, and dimensional precision under rigorous manufacturing conditions.

Specifically tailored for 300 mm wafer applications, these bases ensure stable and accurate placement within diffusion, oxidation, LPCVD, and annealing furnace systems. Their refined surfaces and robust structure minimize particle contamination and thermal deformation, helping maintain a clean and consistent process environment.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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